Products

Sputter targets

Diverse options

We can advise you on all issues relating to sputter targets!

Target measurement
Target segmentation
Bonding technology
Monolithic/bonded cost comparisons
Suitable backing plates
Support with new material combinations

We have extensive experience in the manufacture of ceramics and produce oxide and non-oxide ceramics as sputter targets for the coatings industry, as well as metals and alloys. The different properties make it possible to develop tailor-made materials for the respective application through chemical modification and the formation of ceramic mixtures. In this way, the electrical conductivity of ceramic targets, which are normally used as isolators, can be influenced in a targeted manner in a broad range by using additives to make them very good electrical conductors.

With the manufacture of targeted mixtures, the hardness, chemical resistance and visual properties, for example, can be broadly adapted to suit the specific wishes of the customers. A further important area is mixtures of ceramic materials and metals, so-called cermets. We have the whole value chain in house: from the treatment of raw materials to the manufacture of the ceramics, the processing right up to bonding the targets.

Material type of the sputter target	Planar target	tubular target	Examples
Standard metals	•	•	Al, Cu, Ti ...
Alloys	•	•	Al/Si, Ti/Al ...
Precious metals	•		Au, Pt, Ag ...
Rare earth metals	•		Ce, Er, Tb ...
Oxide ceramics	•	•	Al₂O₃, AZO, ITO ...
Non-oxide ceramics	•		B₄C, TiB₂, LaB_{6 ...}
Special materials	•		B, Ge, Si ...

We supply planar targets and tubular targets, monolithic and bonded for PVD sputter systems.

Targets of 25 - 4000 mm and bonded
Optimal adaptation to the application-specific conditions
Suitable choice of backing plates depending on the target material
Purities of up to 7N
Recycling of used targets

The manufacturing technology applied depends on the:

Target material (ceramic, metal, alloy, cermet)
Requirements (purity, structure, chemical composition)
Target size
Material composition

Manufacturing technologies:

Casting
Vacuum casting
Hot pressing
Hot isostatic pressing (HIP)
Sintering