Materials

Oxide ceramics


Interesting properties for the coatings industry
Oxide ceramic targets have very interesting properties to offer for the coatings industry with attractive future potential. As they are electrically non-conductive by nature, the area of use for possible applications is considerably limited. However, the chemical and physical structure of oxide ceramics allows them to influence the electrical conductivity in a broad range through diffusion processes or chemical reactions.

Thanks to our innovative development and research, a whole series of sub-oxide ceramic targets are manufactured, such as tantalum suboxide, aluminium suboxide, titanium suboxide or niobium suboxide. These open up a wider range of possibilities in application for the customer thanks to their unique structure.

Material sputter target planar bonded Tube bonded Chem. formula Purity % Density g/cm³ Melting point °C Molar mass g/mol
Aluminum oxide   Al2O3 99 3.94 2045 101.96
Boron oxide   B2O3 99.9 2.46 450 69.62
Cerium oxide   CeO2 99.9 7.13 2600 172.11
Hafnium oxide   HfO2 99.9 9.68 2774 210.49
Indium tin oxide (ITO)   In2O3/Sn2O3 99.99 7.18 850 **
Magnesium oxide   MgO 99.95 3.58 2852 40.3
Niobium oxide Nb2O3 99.9 4.6 1520 265.8
Scandium oxide   Sc2O3 99.9 3.86 2485 137.9
Silicon oxide   SiO2 99.9 2.08 1710 60.08
Vanadium oxide   V2O5 99.9 3.357 690 181.88
Yttrium oxide   Y2O3 99.9 5.01 2410 225.8
Zinc oxide ZnO 99.99 5.61 1975 81.39
Zinc oxide/Al2O3 (AZO) ZnO/Al2O3 99.99 ** ** **
Tin oxide   Sn2O3 99.9 6.95 1630 150.71
Zircon oxide   ZrO2 99.5 5.89 2700 123.22
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