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Targets

 

Material type of the sputter target Planar target Rotatable target Examples
Standard metals

Al, Cu, Ti ...

Alloys

Al/Si, Ti/Al ...

Noble metals

 

Au, Pt, Ag ...

Rare earth

 

Ce, Er, Tb ...

Oxide ceramics

Al2O3, AZO, ITO ...

Non-oxide ceramics

 

B4C, TiB2, LaB6 ...

Special materials   B, Ge, Si ...

 

We deliver planar targets and rotatable targets, monolithic and bonded targets for PVD sputter systems.