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Electrically conductive Tantalumpentoxide Ta2O5

 

In a research project together with the Fraunhofer-Institute IST we have developed electrically conductive Tantalumpentoxide Sputtertargets (Ta2O5) for DC-Sputtering.

 

The research project was promoted by the BMWi.

 

The targets are manufactured in planar and rotatable shape.

Available Size

Planar targets according to customer drawing
Rotatable target standard Inner diameter: 133mm, outer diameter 150mm
Length segment

270mm

 

Properties

Purity  99,95%
Density  97%
Spec. electric Resistance  12 Ωm
Retractive Index (525mm) 2,17
Transmission  (525mm) 97%