In a research project together with the Fraunhofer-Institute IST we have developed electrically conductive Tantalumpentoxide Sputtertargets (Ta2O5) for DC-Sputtering.
The research project was promoted by the BMWi.
The targets are manufactured in planar and rotatable shape.
|Planar targets||according to customer drawing|
|Rotatable target||standard Inner diameter: 133mm, outer diameter 150mm|
|Spec. electric Resistance||12 Ωm|
|Retractive Index (525mm)||2,17|