Home > Vacuum pump fluids and grease > Properties of Vacuum pump oils

Properties of Vacuum pump oils

  Basic material Viscosity mm2/s 
(40°C)
Flash point
°C
Vapour presssure
mbar (20°C)
Rotary pump oil M-100V M 100 ca. 250 ca. 10-3
MW-95V M 95 > 250 ca. 10-3
WA-70V M ca. 70 > 240 ca. 10-3
DSL-100 K ≥ 90 ≥ 250 1 x 10-5
3/6V-C F 25 not flammable 5,2 x 10-7
6/14V-C F 60 not flammable 2,6 x 10-7
12/25V-C F 95 not flammable 1,3 x 10-7
Diffusion pump oil M-60VD M 60 >245 up to 2 x 10-9
DP-201 M 17 >200 5 x 10-6
S-04V S 33 >230 5 x 10-7
S-02V S 29 >230 2,5 x 10-6
S-05V S 175 at 25°C 243 3 x 10-10

*The list represents just the most important properties. More information upon request.

Basic materials:

  • M Mineral oils; tight fraction, selectively refined or additivated
  • F Perfluor-Polyether, with BAM-Certificate for pure oxygen application
  • S Silicon
  • K Synthetic Hydrocarbon